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Pressure Gauge for Semiconductor Industry

  GW28
 
This pressure gauge demonstrates an excellent performance even under severe conditions, such as measuring in semiconductor gases of high purity or in a corrosive atomosphere .
Being well-designed for leakage and cleanliness,this is adequate for the applecation,such as for semiconductor process lines and under high purifield fluids.

 
 

FEATURES

Being a small diameter ,28mm in size, this model will contribute to space-saving in as integrated mounting.
This model has seen a reduction of about a half of the gas trapping space in comparison to the bourdon tube type models.
Since the gas contact part of a GW28 is simply of of the diaphragm ,unlike a conventional C-shaped bourdon tube,an easy cleaning and a gas flushing are availabele to a user.
 
Catalog download(pdf TYPE, 434.622KByte)
 
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