Products Guide | NAGANO KEIKI CO., LTD.

This regulator was developed for semi-conductor process industry applications for medium flow rate range.
It is designed to prevent particles to generate and measuring fluid to stagnate, and thus achieved a high reliability.
With the same width between the pipe ends and the identical positions of the connections, XR67 can easily replace XR64.

FEATURES

With the smooth-handling, the followingnes of the secondary pressure is
excellent.
This regulator satisfies the necessary conditions to keep high-purity gases
clean by the application of the ultra-clean treatment.
The anti-corrosiveness has been improved and the product life extended
since employing the Co-Ni alloy as the standard diaphragm material.
XR67 can be even suitable for the gases for manufacturing semi-conductors,
which requires high-purity, by applying the CRP and the FP treatments.

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Model XR67 Pressure Regulator (For medium flow rate)

FEATURES