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Pressure Transmitter for Ultrapure Water of Semiconductor Production Appliances

  KL91
 
This instrument is a pressure transmitter for ultrapure water which uses all-fluorineresin at the wetted parts, and has small metal ion elution amount. It is constructed
to low and negative pressure, as well as to minimize the liquid accumulating parts.
The case construction is IP65 compatible and EMC resistant the level of CE.(EMC Directive Compliance) Applicable directive: 89/336/EEC

 
 

FEATURES

ˇ¦The all-fluorine resin wetted parts consist of a fluorine resin film multilayer laminated onto a ceramic diaphragm, and suppress the amount of metal ion elution and the generation of contamination.
ˇ¦Compatible with connectable piping diameters of up to 1". (In-line type)
ˇ¦Mounts a capacitance type sensor, and has excellent temperature characteristics and response.
 
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