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Semiconductor Use

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This pressure gauge demonstrates excellent performance even under severe conditions such as measuring highly-corrosive fluid and in a corrosive atmosphere.
As enough attention has been paid for hermetic properties and cleanliness at the time of manufacture, this pressure gauge is appropriate for the application to especially fluid of a high degree of purity including semiconductor process.

 
 

FEATURES

+As main parts including a Bourdon tube, base, case and interior mechanism are made of stainless steel, excellent corrosion resistance not only for measuring fluid but also for environment is demonstrated.
+Liquid contacting portions such as a pressure element are welded by an argon-arc welding method, and, additionally, this pressure gauge has been manufactured under strict quality control including pressure resistance and hermetic properties test.
+Blowout disk is installed to the case as a standard. In case of Bourdon tube rupture, glass damage will beˇˇprevented.

*In case of selecting pressure gauge, choose the pressure range which can be used in between 30-65% of full scale, so that the gauge can give its full capacity.
 
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