Products Guide | NAGANO KEIKI CO., LTD.

This is a simple, small and lightweight pressure switch which has been specially developed for various applications of gases indispensable for semiconductor industry, and is capable of direct connection to an appliance when it is used. In manufacturing process of this pressure switches, enough attention has been paid to cleanliness and hermetic properties, and products are supplied through strict quality control and performance tests. So, this pressure switch is appropriate for the process of semiconductor industry and for gas of a high degree of purity.

FEATURES

+The application of this pressure switch to places with limited installing space is convenient because of its small and lightweight type.
+Pressure setting is easily performed.
+Stable control is assured because of a mechanism without applying excessive loads to a microswitch.
+Cleaning and assembling work are performed in a clean bench(class 100) and a clean room, to secure cleanliness. Complete degreasing is performed by a Freon ultrasonic cleaning method, anti-oil and anti-water treatment is also applied, and after completion, products are hermetically packaged in dust-free polyethylene packages.
+The gas contacting portion of diaphragm type is electrolytically polished.

*The set pressure range with which a pressure gauge functions precisely and for a long period of time is 30% to 60% of the pressurerange.

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Semiconductor Use

FEATURES