This is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry.

FEATURES +By keeping up the trend of lower expenses and smaller apparatus of gas supply system, this pressure regulator has been especially designed in small size. +Assembly, adjustment, inspection and packaging are performed in a clean room(class 10000), minimizing the number of particles. +For secondary pressure monitoring, a pressure regulator with a pressure gauge is provided.   Catalog download

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