This is a pressure regulator developed for semiconductor process control.
Dust occurrence and measuring fluid stagnancy are effectively prevented, assuring high reliability.

FEATURES +The smooth operation of a knob is provided. Secondary pressure in compliance with knob movement is excellent. +By performing ultraclean(UC) treatment, conditions for keeping an environment clean is satisfied. +A small, high-performance pressure sensor equipped with a semiconductor strain gauge for measuring primary(original) pressure and secondary(adjusted) pressure is installed and measured pressures will be digitally indicated. +In the semiconductor manufacturing process mass flow is required in purging gas line and carrier gas (rarefied gas) and it is relatively compact.   Catalog download

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