Products Guide | NAGANO KEIKI CO., LTD.

The XR66 is a compact high flow rate type pressure regulator which is usable at the point of use of semiconductor processes.

FEATURES

+Comparatively large flow rate of standerd flow 20L/min. maximum flow 50L/min. in a compact case.
+Capacity is a low 3.7mL and the gas contact part is ultra clean(UC) treated.
+There are no threads which can cause outgas and particle generation at the gas contact part.
¡¦1.5 integration type is also available.

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Compact Pressure Regulator

FEATURES